| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fec576c38e34882531ca37d6b922bf42 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24364 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02068
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-1233
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-63 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D7-12 |
| filingDate |
2013-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b228c353f08cb7f55a2ebb7111b94a5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5224f5190f40accf78ba0e169e061bec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e70cf32c571bb4b8aa2bd45fe4563ab7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9b9a613bcef79b90eb93f85cc5e36f2 |
| publicationDate |
2015-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015270123-A1 |
| titleOfInvention |
Liquid Chemical for Forming Protective Film |
| abstract |
A liquid chemical for forming a water-repellent protective film, containing: a water-repellent protective film forming agent for forming a water-repellent protective film on a wafer having at its surface an uneven pattern and containing at least one kind of element selected from titanium, tungsten, aluminum, copper, tin, tantalum and ruthenium at surfaces of recessed portions of the uneven pattern, the protective film being formed at least on the surfaces of the recessed portions by retaining the liquid chemical at least on the recessed portions of the wafer before a rinsing treatment step of rinsing the wafer surface with a rinsing liquid consisting only of a protic polar solvent or a rinsing liquid containing a protic polar solvent as the principal component; and a solvent. The water-repellent protective film forming agent is at least one kind of compound represented by the following general formulas [1] to [3]. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11735646-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020135899-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10868148-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021057551-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111128730-A |
| priorityDate |
2012-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |