| abstract |
The present invention relates, in general, to the purification of boron trichloride (BCl 3 ). More particularly, the invention relates to a process for minimizing silicon tetrachloride (SiCl 4 ) formation in BCl 3 production and/or the removal of SiCl 4 in BCl 3 product stream by preventing/minimizing the silicon source in the reaction chambers. In addition, a hydride material may be used to convert any SiCl 4 present to SiH 4 which is easier to remove. Lastly freeze separation would replace fractional distillation to remove SiCl 4 from BCl 3 that has been partially purified to remove light boilers. |