http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015259193-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-015 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00476 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-0038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00301 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 |
| filingDate | 2015-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e475f4ba31a751128b696da1e2455db1 |
| publicationDate | 2015-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2015259193-A1 |
| titleOfInvention | Mems device and method of manufacturing the same |
| abstract | A present MEMS device includes: a functional element with a connection electrode; a structural member that forms a cavity surrounding the functional element; a second insulating film provided so as to surround a predetermined region on a first surface of the connection electrode; a first lid portion that has a third insulating film, is provided with an opening, and covers a part of the cavity; a second lid portion that has a first conductive member and a sealing portion, the first conductive member being electrically connected to the predetermined region of the connection electrode, and the sealing portion sealing the opening of the first lid portion; a fourth insulating film that insulates the first conductive member from the sealing portion; and a second conductive member that penetrates the fourth insulating film and is electrically connected to the first conductive member. |
| priorityDate | 2014-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.