http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015255300-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-845
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0886
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823431
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3085
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-785
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308
filingDate 2014-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb89d5e2d1cbc7cb60855ce53480a740
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32851973f943bf24ed4cf9a315f064e4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_187eaa502e4d2780f24df2d238cb1df2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56d255f880b216f06936abad4ef30b51
publicationDate 2015-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2015255300-A1
titleOfInvention Densely spaced fins for semiconductor fin field effect transistors
abstract A method of forming a fin-based field-effect transistor device includes forming one or more first fins comprising silicon on a substrate, forming epitaxial layers on sides of the one or more first fins, and removing the one or more first fins to form a plurality of second fins.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9837276-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10347657-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10090166-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017205136-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10366890-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9852946-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10566250-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9786554-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9659786-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3300117-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10163659-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10224250-B2
priorityDate 2014-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013256759-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005277755-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3084099
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522015
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261

Total number of triples: 45.