http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015247240-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1b49b135f099e96a0e4cab2427a48ae8 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F19-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-06 |
| filingDate | 2013-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e84039e8c5095dfccfe0f8d39b72f7dd |
| publicationDate | 2015-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2015247240-A1 |
| titleOfInvention | Deposition of metal films based upon complementary reactions |
| abstract | A method comprises contacting a compound having formulae (1) with a compound having formula ML o to form a metal: n [M(SiR 3 ) m (L 1 ) p ] n (1)n n whereinn M is Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Al, a second row transition metal or a third row transition metal; R are each independently H, C 1 -C 6 alkyl or —Si(R″) 3 ; R″ are each independently H or C 1 -C 6 alkyl; m is an integer from 1 to 3; n is a number representing the formation of aggregates or polymeric material; L 1 is a neutral donor ligand; L is a ligand; p is an integer from 0 to 6; andn o is an integer representing the number of ligands bonded to ML o . |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11015241-B2 |
| priorityDate | 2012-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 104.