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filingDate 2015-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bedcd3457ff5ab010e7aaa524c3ef551
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publicationDate 2015-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2015225297-A1
titleOfInvention Ceramic material and sputtering target member
abstract The present invention provides a ceramic material comprising magnesium, gallium, lithium, and oxygen as main components, wherein a crystal phase of a solid solution attained by dissolving gallium oxide and lithium oxide in magnesium oxide is a main phase. An XRD peak of a (200) plane of the solid solution with CuKα rays preferably appears at 2θ=42.91° or more which is larger than an angle at which a peak of a Cubic crystal of magnesium oxide appears, more preferably appears at 2θ=42.91° to 43.28°, and further preferably appears at 2θ=42.91° to 43.02°. In the ceramic material, a molar ratio Li/Ga of Li to Ga is preferably 0.80 or more and 1.20 or less.
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type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 47.