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publicationDate 2015-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2015218300-A1
titleOfInvention Block copolymer and pattern forming method using the same
abstract A block copolymer includes: a first block, and a second block copolymerized with the first block. The second block includes a silyl group including a ring-type functional group.
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