| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3082cd39bb800686b9abbb8aa05c80b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 |
| filingDate |
2015-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f7c06b538b57d4ecac4b9c24fd54b86d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39c6e73983b7b0926d6cf54503db1b93
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9a05f507df5e833e72d83725bfa8cc2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_144bda331a3874a6a9f02d9a7d26c38f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5bb9977fa95a702752def9ec1f82298 |
| publicationDate |
2015-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015184029-A1 |
| titleOfInvention |
Polishing composition and method utilizing abrasive particles treated with an aminosilane |
| abstract |
The inventive method comprises chemically-mechanically polishing a substrate with an inventive polishing composition comprising a liquid carrier and abrasive particles that have been treated with a compound. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11690520-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10570315-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018127618-A1 |
| priorityDate |
2007-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |