| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_81cfb88d909c75104c0c8d61799a72b0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b7886f9841c03e2449d28f454ebbe1dc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31133
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-364 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-04 |
| filingDate |
2013-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_883981f2eebe401c9a4d9d72d5e27da5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b14cc4e658f41b3630568296517b6137
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9a55528231b8de1bdd8dce528c84105a |
| publicationDate |
2015-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015168843-A1 |
| titleOfInvention |
Composition and process for stripping photoresist from a surface including titanium nitride |
| abstract |
A method and low pH compositions for removing bulk and/or hardened photoresist material from microelectronic devices have been developed. The low pH compositions include sulfuric acid and at least one phosphorus-containing acid. The low pH compositions effectively remove the hardened photoresist material while not damaging the underlying silicon-containing layer(s) or the metal gate materials. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10920141-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10032633-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10475658-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11127587-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10472567-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10428271-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10167443-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10347504-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10138117-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10557107-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10340150-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017044470-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9765288-B2 |
| priorityDate |
2012-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |