| abstract |
There is provided an actinic ray-sensitive or radiation-sensitive resin composition containing a compound represented by Formula (1): n n n n n n n n n n n n wherein R 1 represents a polycyclic aromatic group or a polycyclic heterocyclic aromatic group, n R 2 represents a (n+2)-valent saturated hydrocarbon group. n R 3 represents a (m+2)-valent saturated hydrocarbon group, n R 4 and R 5 each independently represent a substituent, n Q represents a linking group containing a heteroatom, n m and n each independently represent an integer of 0 to 12, when n is 2 or more, R 4 's may be the same or different, R 4 's may be linked to each other to form a non-aromatic ring together with R 2 , when m is 2 or more, R 5 's may be the same or different, and R 5 's may be linked to each other to form a non-aromatic ring together with R 3 , and n X − represents a non-nucleophilic anion. |