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publicationDate 2015-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2015167154-A1
titleOfInvention Method for implanted-ion assisted growth of metal oxide nanowires and patterned device fabricated using the method
abstract An embodiment of the present disclosure provides a method of growing metal oxide nanowires by ion implantation, the method including the steps of: depositing a metal oxide thin film on a substrate; implanting ions into the metal oxide thin film; and heating the ion-implanted metal oxide thin film to grow metal oxide nanowires.
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