| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105 |
| filingDate |
2013-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_faf03b9f9206278815761266d2470ab3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6cbd38b6b5531ac6f59ed14cb757c57b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_324a2ff5b6e418f19f000ef846ecd0b7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fe2e357703acfbf51cf20f196506eba |
| publicationDate |
2015-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015166837-A1 |
| titleOfInvention |
Composition and method for chemical mechanical polishing |
| abstract |
A composition for chemical mechanical polishing includes a plurality of particles and a plurality of abrasive particles. Each of the plurality of particles includes a body and a functional group. The body is configured to transfer energy of an incident light into a plasmonic wave. The functional group is configured to bind onto a metal containing layer. |
| priorityDate |
2013-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |