| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_099413ae0cf5a2b6398b5151766cd260
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-133368
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-13345 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-133553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1309
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1313
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B13-0026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-1334 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-00 |
| filingDate |
2014-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_76cd5fa921e7feb7d6cf9523c3fda7fa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_470ec1713eeba89f103d545048fa3b12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05754c03e63ce93768d48f76009301b2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a2ee409f2cdf9012f7506f24e15a548
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_988d7075274dc393a92feecedd714521
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b95b734ef3047d2e9b63bea53c962a1b |
| publicationDate |
2015-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015153593-A1 |
| titleOfInvention |
Substrate inspection apparatus including liquid crystal modulator and manufacturing method of the liquid crystal modulator |
| abstract |
A substrate inspection apparatus includes a liquid crystal modulator configured to be provided on a substrate, a light source unit provided to be spaced apart from the liquid crystal modulator, a beam splitter provided between the liquid crystal modulator and the light source unit configured to reflect a beam of light from the light source to the liquid crystal modulator, and a measurement unit configured to sense the beam of light reflected by the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022214571-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11604386-B2 |
| priorityDate |
2013-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |