Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-74 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-742 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-781 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-958 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-723 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-904 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-92 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-953 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C12Q1-6869 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y15-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C12Q1-6874 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00087 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-48721 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C12Q1-68 |
filingDate |
2015-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2723c796303c88bbd8633108aefd8f5d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9fd53b11e040d10ced462659ac3db691 |
publicationDate |
2015-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2015141299-A1 |
titleOfInvention |
Fabricating self-formed nanometer pore array at wafer scale for dna sequencing |
abstract |
A technique is provided for a structure. A substrate has a nanopillar vertically positioned on the substrate. A bottom layer is formed beneath the substrate. A top layer is formed on top of the substrate and on top of the nanopillar, and a cover layer covers the top layer and the nanopillar. A window is formed through the bottom layer and formed through the substrate, and the window ends at the top layer. A nanopore is formed through the top layer by removing the cover layer and the nanopillar. |
priorityDate |
2012-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |