http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015141299-A1

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filingDate 2015-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2015-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2015141299-A1
titleOfInvention Fabricating self-formed nanometer pore array at wafer scale for dna sequencing
abstract A technique is provided for a structure. A substrate has a nanopillar vertically positioned on the substrate. A bottom layer is formed beneath the substrate. A top layer is formed on top of the substrate and on top of the nanopillar, and a cover layer covers the top layer and the nanopillar. A window is formed through the bottom layer and formed through the substrate, and the window ends at the top layer. A nanopore is formed through the top layer by removing the cover layer and the nanopillar.
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