http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015132921-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c85d78c6a4459b5dbbc49c82a4c5c107 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762 |
| filingDate | 2014-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be702890cce20140ca728821dbffdf7d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_659b0093db45b772a8d8d2d17849ae52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28a6da6719f5d5eba9f103f9fe7ce378 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ad451d1ac1c4827818fcfaa3cb83a20 |
| publicationDate | 2015-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2015132921-A1 |
| titleOfInvention | Gap-fill methods |
| abstract | Provided are gap-fill methods. The methods comprise: (a) providing a semiconductor substrate having a relief image on a surface of the substrate, the relief image comprising a plurality of gaps to be filled; (b) applying a gap-fill composition over the relief image, wherein the gap-fill composition comprises a self-crosslinkable polymer and a solvent, wherein the self-crosslinkable polymer comprises a first unit comprising a polymerized backbone and a crosslinkable group pendant to the backbone; and (c) heating the gap-fill composition at a temperature to cause the polymer to self-crosslink. The methods find particular applicability in the manufacture of semiconductor devices for the filling of high aspect ratio gaps. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9465018-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9921207-B2 |
| priorityDate | 2013-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 201.