patent/US-2015128994-A1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015128994-A1

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67742 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0206 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
filingDate	2014-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_357f162becdd0ca0ee9479a013207021 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c601c6e99566058ead1e5531ba51a4d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a6e2f64522529fe8e7c786e04412bcc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2870225302f278f01327b0ff5682421 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6192420265a99802c3a98c83d7e922bb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b0eb31ccbd76cdb8422227d666c60cf
publicationDate	2015-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-2015128994-A1
titleOfInvention	Substrate cleaning method, substrate cleaning system, and memory medium
abstract	A method for cleaning a substrate includes supplying to a substrate a film-forming processing liquid which includes a volatile component and forms a film on the substrate, vaporizing the volatile component in the film-forming processing liquid such that the film-forming processing liquid solidifies or cures on the substrate and forms a processing film on the substrate, supplying to the substrate having the processing film a strip-processing liquid which strips the processing film from the substrate, and supplying to the processing film formed on the substrate a dissolving-processing liquid which dissolves the processing film after the supplying of the strip-processing liquid.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11784057-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11020776-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I760091-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11342203-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109904093-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017084480-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11517941-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11152228-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I700133-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I651759-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019091737-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10935896-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11211241-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102426393-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11260431-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10792712-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10619894-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11404292-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210020062-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018024447-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I721438-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9870914-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11413662-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3667703-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022323998-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110121762-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11101147-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017040154-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10121646-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210139418-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017345685-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019176179-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10734255-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10486203-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3576133-A1
priorityDate	2013-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013037048-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012017934-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006054181-A1
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3084099 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522015 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512377 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7910

Total number of triples: 70.