| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_069a92549123806a5d654dc036a676e9 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2801
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2223-54466
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2446
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2817
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-202
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2441 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-2204
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-05 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28 |
| filingDate |
2015-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1499b0c7d681fe29118f4fb32692913f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e67d0a81c1e378e9a21a3840d080848f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2cf52c5ac919c444834bdd56f49f1d6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d794cb510ddf1d0bfca6cebe2fe7673c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf13b53d1d63d519fa3bdbcd284c76fa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_866fe99d3c7d10788b7ce098d601c1b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_202cadaeddde05297674b5fc391f52e5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f987da517db545fcc5ec67efdf268d79
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16f05ee62667b5b31cd8e0c286d62aaa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e8aac862771a9e0e9a72978f3f60110
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86056225dc4c30672104f49664b4bed1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c89059aadb7f972db8acb81e45567d9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f9318ed995a48f5baf8e3d78b752556 |
| publicationDate |
2015-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015122993-A1 |
| titleOfInvention |
Testing apparatus using charged particles and device manufacturing method using the testing apparatus |
| abstract |
A substrate is irradiated by primary electrons and secondary electrons generated from the substrate are detected by a detector. A reference die is placed on the stage to obtain a pattern matching template image including feature coordinates of the reference die. A pattern matching is performed with an arbitrary die in a row or column including the reference die using the template image to obtain feature coordinates of the arbitrary die. An angle of misalignment is calculated between the direction of the row or column including the reference die and one of the directions of movement of the substrate on the basis of the feature coordinates of the arbitrary die and those of the reference die. The stage is rotated to correct the angle of misalignment to conform the direction of the row or column including the reference die with the one of the directions of movement of the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021208061-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113109356-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I752008-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019056263-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11764042-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10823606-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11650146-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10816833-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11289311-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021381826-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11105619-B2 |
| priorityDate |
2003-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |