| abstract |
Embodiments of the invention are directed to a method of preparing a WN x , WN x C y , WN x O z , and WN x C y O z solid by the deposition of a WN x precursor at a temperature below 300° C. The WN x precursor is a tungsten nitrido complex. The deposition can be carried out using a tungsten nitrido complex as a single-source metal organic precursor. In an embodiment of the invention, the deposition can be performed to form a plurality of WN x , WN x C y , WN x O z , WN x C y O z nanoparticles. |