| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fb11c8dcf8ef9b6c8b9b8a3f73668310 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-088 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28008 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-088 |
| filingDate |
2013-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_076f310441f28c94ec132ff2069b1d54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_885ca26ff6f8e344abe8b0c2c6b19446
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45dee305cd8c1c9a6437a71f9eca2c85 |
| publicationDate |
2015-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015097224-A1 |
| titleOfInvention |
Buried trench isolation in integrated circuits |
| abstract |
A system and method for providing electrical isolation between closely spaced devices in a high density integrated circuit (IC) are disclosed herein. An integrated circuit (IC) comprising a substrate, a first device, a second device, and a trench in the substrate and a method of fabricating the same are also discussed. The trench is positioned between first and second devices and comprises a first filled portion and a second filled portion. The first filled portion of the trench comprises a dielectric material that forms a buried trench isolation for providing electrical isolation between the first and second devices. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016196798-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9831114-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10256137-B2 |
| priorityDate |
2013-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |