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publicationDate 2015-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2015087118-A1
titleOfInvention Method of forming a high electron mobility transistor
abstract A method of forming a high electron mobility transistor may include: forming a second III-V compound layer on a first III-V compound layer, the second III-V compound layer and the first III-V compound layer differing in composition; forming a p-type doped region in the first III-V compound layer; forming an n-type doped region in the second III-V compound layer, the n-type doped region overlying the p-type doped region; forming a source feature over the second III-V compound layer, the source feature overlying the n-type doped region; and forming a gate electrode over the second III-V compound layer, the gate electrode disposed laterally adjacent to the source feature.
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Total number of triples: 35.