| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_375e56c930a010a3edfedac830bb8bb1 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-008 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00 |
| filingDate |
2014-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91ddf9ed30e5c8de24413baaad42ad0e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_efc2e7fe80c864a9e8632e10a59cf577 |
| publicationDate |
2015-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015083939-A1 |
| titleOfInvention |
Extreme ultraviolet light generation device and extreme ultraviolet light generation system |
| abstract |
An extreme ultraviolet light generation device may be configured to generate extreme ultraviolet light by irradiating a target with a laser beam to turn the target into plasma. The extreme ultraviolet light generation device may comprise: a chamber provided with at least one through-hole; an optical system configured to introduce the laser beam into a predetermined region in the chamber through the at least one through-hole; and a target supply device configured to supply a powder target as the target to the predetermined region. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017127505-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017082664-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I774528-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10667375-B2 |
| priorityDate |
2012-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |