| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-20061
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-30148 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T5-002 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06T5-00 |
| filingDate |
2014-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4cc0547f61c2d036715d279be1b0c73
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa7bd2bfcc18146e6b886d672f03a8ca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d046494aff2c6afc49a616e6390f5f5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5927edf0c712b9408322ef04220bdefa |
| publicationDate |
2015-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015063677-A1 |
| titleOfInvention |
Scratch Filter for Wafer Inspection |
| abstract |
Methods and systems for filtering scratches from wafer inspection results are provided. One method includes generating a defect candidate map that includes image data for potential defect candidates as a function of position on the wafer and removing noise from the defect candidate map to generate a filtered defect candidate map. The method also includes determining one or more characteristics of the potential defect candidates based on portions of the filtered defect candidate map corresponding to the potential defect candidates. In addition, the method includes determining if each of the potential defect candidates are scratches based on the one or more characteristics determined for each of the potential defect candidates and separating the potential defect candidates determined to be the scratches from other defects in inspection results for the wafer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10489902-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10957035-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021334989-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115485628-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I780741-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11494924-B2 |
| priorityDate |
2013-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |