| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F21Y2115-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F21Y2115-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F21S2-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8806
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J1-04 |
| filingDate |
2014-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44fc59a1685dd38699d52762a3cc7e0c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af9bcd4fcca3d996b4d708a23c010a99
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d629b3a63d0204879f99d2817a90ba8b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c0c0fd276ff2c7f274cb0802c197a1c |
| publicationDate |
2015-02-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015041666-A1 |
| titleOfInvention |
Multi-Spot Illumination For Improved Detection Sensitivity |
| abstract |
Methods and systems for minimizing interference among multiple illumination beams generated from a non-uniform illumination source to provide an effectively uniform illumination profile over the field of view of an inspection system are presented. In some examples, a pulsed beam of light is split into multiple illumination beams such that each of the beams are temporally separated at the surface of the specimen under inspection. In some examples, multiple illumination beams generated from a non-uniform illumination source are projected onto spatially separated areas on the surface of the specimen. A point object of interest illuminated by each area is imaged onto the surface of a time-delay integration (TDI) detector. The images are integrated such that the relative position of the illumination areas along the direction of motion of the point object of interest has no impact on the illumination efficiency distribution over the field of view. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10044164-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019257765-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9768577-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102537558-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9525265-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018085233-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190077491-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106886597-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I778988-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10732126-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10677739-B2 |
| priorityDate |
2013-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |