| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4da8aa11cd9d44342153af8864a90e57
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d917b6b7f8a9fdfef4dd80694e8c98d2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_72176bd75f77a800c7096a8e325c1ed4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cfd9a0bcf45882181f37e50337b2a7d6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f153b7b4e4facf79c6b31e41e1d36aea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3a380fa623c6198f17b5ce40c3b7ac14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_93315dc1405facdb89c56ec4d4fc9a43 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31058
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B43-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0338
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32139 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00 |
| filingDate |
2014-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58f1ed16afd80569925d4875cf59c396
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e489e139fa289661f75de55a555b13af
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_290b7bf8243fd1bdc5b5826410d1cee7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3751d291f0793290f4201c50bdac06a2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0d383ccbbb58d8f7046f0d6cd667896
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e67afb187e5f2202733feb84d0cbbb63
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f2750042a1d44b447f0b68cff8e36d0 |
| publicationDate |
2015-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2015021513-A1 |
| titleOfInvention |
Cmp slurry composition for polishing an organic layer and method of forming a semiconductor device using the same |
| abstract |
A chemical mechanical polishing (CMP) slurry composition for polishing an organic layer and a method of forming a semiconductor device using the same are disclosed. The CMP slurry composition may include from 0.001% to 5% by weight of oxide-polishing particles; from 0.1% to 5% by weight of an oxidant; from 0% to 5% by weight of a polishing regulator; from 0% to 3% by weight of a surfactant; from 0% to 3% by weight of a pH regulator; and from 79% to 99.889% by weight of deionized water. The use of the CMP slurry composition makes it possible to allow a silicon-free organic layer to be polished with a selectivity higher than 6:1 with respect to an oxide layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10287468-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11062986-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022221248-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11078112-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9960169-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017107405-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108054085-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111286334-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111315836-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10640681-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112680227-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9994737-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021023748-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I716804-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11479863-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11114309-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10032890-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11554984-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11774233-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107636110-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10665500-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020113551-A1 |
| priorityDate |
2013-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |