http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015007766-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0c468e687b43595cae7cb1c2667678f1 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-165 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-403 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B35-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B35-00 |
| filingDate | 2014-07-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5b730c161f1829d906c4991c1382546 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83c2011003da8d34d2ec5cb65d5bed41 |
| publicationDate | 2015-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2015007766-A1 |
| titleOfInvention | Vapor phase growth apparatus and vapor phase growth method |
| abstract | A vapor phase growth apparatus of an embodiment includes: a reaction chamber; a gas supply path connected to an organic metal supply source at a first connection, the gas supply path being connected to a carrier gas supply source, the gas supply path supplies a process gas including organic metal and a carrier gas into the reaction chamber; a gas discharge path connected to the organic metal supply source at a second connection, the gas discharge path discharges the process gas to the outside of the apparatus; a first mass flow controller and a first adjustment device provided at the gas supply path; a second adjustment device provided at the gas discharge path; and a shortcut path connecting the gas supply path to the gas discharge path. One of the first and the second adjustment device is a back pressure regulator, and the other is a mass flow controller. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10438795-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018203256-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D810705-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D819580-S |
| priorityDate | 2013-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.