| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f61ad03c2686ee126e058fd2edcc51c8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_70d3d37d6fafac4b4091b6d25fe991e6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_08c8de8f88e367264ad8b6fcd81302cf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_92803609aabf3fd40b672101b57aeb08 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02366
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02363 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-0236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08 |
| filingDate |
2012-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_edbe8fdf3f99a17d7bf66fbc31911030
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bed07c8fe22a9513763cad6b67da4a2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c17c3b77af13f11391bddd1759f69817 |
| publicationDate |
2014-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2014370643-A1 |
| titleOfInvention |
Formulation for acidic wet chemical etching of silicon wafers |
| abstract |
Acid etch compositions for etching multicrystalline silicon substrates are disclosed which may include hydrofluoric acid, an oxidizer, an acid diluent, and soluble silicon. The soluble silicon may be hexafluorosilicic acid or ammonium fluorosilicate. Silicon substrates patterned with organic resist may be used with the acid etch compositions for selective silicon patterning for solar cell applications. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018120432-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020102655-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10982335-B2 |
| priorityDate |
2011-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |