http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014367035-A1

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filingDate 2014-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1751accf4a4d1a21962d1205280d5450
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publicationDate 2014-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2014367035-A1
titleOfInvention Optical filter, optical filter module, and analyzer
abstract An etalon includes a first substrate and a second substrate. The first substrate has a first protrusion that does not face the second substrate, and a first electrode pad is formed on the first protrusion, whereby connection reliability can be improved.
priorityDate 2010-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 18.