http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014342642-A1
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_069a92549123806a5d654dc036a676e9 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B53-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B53-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B53-017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B53-02 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B53-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B53-017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B53-00 |
filingDate | 2014-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0bc82d59796a55236c1ed8d6154dba21 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5aa5345b64cded7a80aa66a6c59fdbef http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa1817d8cd30c4ad7f41f231eb52f546 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5f0d43859445ddd0dce2db61aaa26da http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a32fdcd262de2d0dcc7b56fcea7063d |
publicationDate | 2014-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | US-2014342642-A1 |
titleOfInvention | Method of obtaining a sliding distance distribution of a dresser on a polishing member, method of obtaining a sliding vector distribution of a dresser on a polishing member, and polishing apparatus |
abstract | The method includes: calculating an increment of a sliding distance of a dresser by multiplying a relative speed between the dresser and a polishing member by a contact time between them; correcting the increment of the sliding distance by multiplying the calculated increment of the sliding distance by at least one correction coefficient; calculating the sliding distance by repeatedly adding the corrected increment of the sliding distance to the sliding distance according to elapse of time; and producing the sliding-distance distribution of the dresser from the obtained sliding distance and a position of a sliding-distance calculation point. The at least one correction coefficient includes an unevenness correction coefficient provided for the sliding-distance calculation point. The unevenness correction coefficient is a correction coefficient that allows a profile of the polishing member to reflect a difference between an amount of scraped material of the polishing member in its raised portion and an amount of scraped material of the polishing member in its recess portion. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016207162-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9943943-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11458589-B2 |
priorityDate | 2013-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 310.