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publicationDate 2014-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2014342291-A1
titleOfInvention Novel Dual-Tone Resist Formulations And Methods
abstract Dual tone photoresist formulations comprising a photoacid generator are described and employed in fabrication techniques, including methods of making structures on substrates, and more particularly, methods of making electronic devices (e.g. transistors and the like) on flexible substrates wherein two patterns are formed simultaneously in one layer of photoresist.
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