| abstract |
A plasma chamber ( 11′ ) for coating a substrate with a polymer layer, the plasma chamber comprises a first electrode set ( 14′ ) and a second electrode set ( 14′ ), the first and second electrode sets are arranged either side of a sample chamber for receiving a substrate, wherein the first and second electrode sets comprise plural electrode layers ( 141′, 142′ ) and wherein each electrode set comprises plural radiofrequency electrode layers or plural ground electrode layers for coating polymer to each surface of a substrate. |