| abstract |
The invention relates to a method and a device ( 20 ) for three-dimensional measurement of an object ( 6 ) using a confocal microscopy method comprising a laser source ( 21 ) for generating an illumination beam ( 3 ), a focusing optics ( 4 ) for focusing the illumination beam ( 3 ) on at least one measuring point ( 5, 23 ) on a surface of the object ( 6 ) to be measured, a detector ( 10 ) for detecting an observation beam ( 9 ) reflected by the surface of the object ( 6 ), a confocal observation optics ( 7 ), which allows only the observation beam ( 9 ) that is focused on the surface of the object ( 6 ) to pass through to the detector ( 10 ). The laser source ( 21 ) comprises multiple coherent laser elements ( 22 ), the laser elements ( 22 ) simultaneously emitting illumination beams ( 3 ) that are focused on multiple measuring points ( 5, 23 ) on the surface of the object ( 6 ), so that the laser elements ( 22 ) are arranged to reduce the speckle effect in the 3D-image data generated by the measurement. |