| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2223-6462
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2817
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2223-611 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3178
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-2251 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-26 |
| filingDate |
2014-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_318e101feec8f4a5f9a5ccce9543b745
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91f3eef518ea0426ebc2d59edfb2468d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1fa7c36d31f48adb274af1bf48dc0b0e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d8f9671ffc1d33711ea3fed3eb96d87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92020f1e081b0bde7bd8693aa7284647
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e8742ae028a95be9a1e375077e0618a |
| publicationDate |
2014-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2014306109-A1 |
| titleOfInvention |
Method for detecting defect of substrate |
| abstract |
A method for detecting defects includes irradiating at least one electron beam into a first region of a substrate, irradiating at least one electron beam into a second region electrically connected to the first region, and detecting secondary electrons emitted from the second region. The electron beam irradiated into the first region may be the same or different from the electron beam irradiated into the second region. Alternatively, different beams may be simultaneously irradiated into the first and second regions. An image generated based on the secondary electrons shows a defect in the substrate as a region having a grayscale difference with other regions in the image. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9711327-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9390884-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018217059-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2016152582-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107112182-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022114714-A1 |
| priorityDate |
2013-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |