| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-166 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-186
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-564
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C12M33-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate |
2014-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc184310b634ae04f445c094155c1dbe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51f1e9f60db10576547691078b4d37a2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bbeb78d178f139257d95c7f17299d1ac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ceb22811d0d9a50e9d953b28ee6f1457 |
| publicationDate |
2014-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2014299058-A1 |
| titleOfInvention |
Deposition device, and collection device |
| abstract |
A Film ( 7 ) is provided on at least a part of a surface of each of a vapor deposition preventing plate ( 3 ) and a shutter ( 4 ) of a vacuum chamber ( 5 ) on which surface vapor deposition particles are vapor-deposited, the film ( 7 ) being provided so as to be peeled off from the each of the vapor deposition preventing plate ( 3 ) and the shutter ( 4 ), and the film being made of a material differing in at least one of a melting point, a sublimation point, solubility in a given solvent, microbial biodegradability, and photodegradability from a material of which a vapor-deposited film that is formed on the film ( 7 ) is made. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105296927-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106702319-A |
| priorityDate |
2010-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |