Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C5-02 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04591 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04581 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04571 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-04501 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-045 |
filingDate |
2013-09-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79a4c297fe26465f427b7bf18a643a56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24e1e689d2193aacf19fc341bd6189ad http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4695b26ce8284dbdee4a8cda8403133d |
publicationDate |
2014-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2014285550-A1 |
titleOfInvention |
Functional liquid ejection apparatus, functional liquid ejection method and imprinting system |
abstract |
A nozzle ejects a functional liquid having a viscosity of not less than 5 millipascal·second and not more than 20 millipascal·second, onto a substrate. The functional liquid inside a pressure chamber connected to the nozzle is pressurized. A drive voltage having a pull waveform element which causes the pressure chamber to expand from a steady state and a push waveform element which causes the expanded pressure chamber to contract, is generated with a relationship between a slope γ 1 representing voltage change per unit time in the pull waveform element, the viscosity η of the functional liquid, a resonance period T c of the head, and a slope γ 2 representing voltage change per unit time in the push waveform element satisfying (2/T c )≦γ 1 ≦(η/10) and γ 2 ≦γ 1 . |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10203597-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017212394-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10369596-B2 |
priorityDate |
2011-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |