| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0276
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D5-00 |
| filingDate |
2013-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f65a72cae7fe32d96a31bd499becf01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eee565e0921f3f7c3d4efebf21724b53 |
| publicationDate |
2014-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2014273506-A1 |
| titleOfInvention |
Unlocking Layer and Method |
| abstract |
A system and method for anti-reflective layers is provided. In an embodiment the anti-reflective layer comprises a polymer resin which has repeating units within it. At least one of the repeating units comprises a locked unit which has a cyclic structure and a lock within the unit. After the anti-reflective layer has been applied and baked, irregularities such as voids and step heights differences that have occurred may be handled by unlocking the lock within the locked unit. This unlocking breaks the cyclic structure, allowing the polymer to take up more volume and causing the anti-reflective layer to self-expand, filling the voids and reducing the step-height. The unlocking may be performed by exposure or thermal treatments. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11269256-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10297510-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015187565-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11094541-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10698317-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10036953-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019265590-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017372892-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10755927-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10163631-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9761449-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110383459-A |
| priorityDate |
2013-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |