| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76852
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32139
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2013-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ef4a25bdb648593cebe7bf17758af8c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b6a79181a443bfb21f378d29c73e694
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8134c5bc9e9bcad2fe3b31a13fd39da1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf64e2e38807094bcb8d9a7beab2ed60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ea000771f5f30cb7dc4180d3c6fc5b8 |
| publicationDate |
2014-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2014273437-A1 |
| titleOfInvention |
Subtractive plasma etching of a blanket layer of metal or metal alloy |
| abstract |
A method of forming at least one metal or metal alloy feature in an integrated circuit is provided. In one embodiment, the method includes providing a material stack including at least an etch mask located on a blanker layer of metal or metal alloy. Exposed portions of the blanket layer of metal or metal alloy that are not protected by the etch mask are removed utilizing an etch comprising a plasma that forms a polymeric compound and/or complex which protects a portion of the blanket layer of metal or metal alloy located directly beneath the etch mask during the etch. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10147782-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10692759-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10615250-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015137372-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9911648-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9564362-B2 |
| priorityDate |
2013-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |