Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45504 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B30-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02521 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-165 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-483 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02631 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-48 |
filingDate |
2014-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cefe12ecebae7ad1def9d44bb26ecb59 |
publicationDate |
2014-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2014273416-A1 |
titleOfInvention |
Apparatus and methods for photo-excitation processes |
abstract |
Embodiments of the invention provide a method and apparatus for depositing a layer on a substrate. In one embodiment, the method includes exposing a surface of the substrate disposed within a processing chamber to a fluid precursor, directing an electromagnetic radiation generated from a radiation source to a light scanning unit such that the electromagnetic radiation is deflected and scanned across the surface of the substrate upon which a material layer is to be formed, and initiating a deposition process with the electromagnetic radiation having a wavelength selected for photolytic dissociation of the fluid precursor to deposit the material layer onto the surface of the substrate. The radiation source may comprise a laser source, a bright light emitting diode (LED) source, or a thermal source. In one example, the radiation source is a fiber laser producing output in the ultraviolet (UV) wavelength range. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-4138121-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015307990-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7336465-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10179948-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11171023-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101705696-B1 |
priorityDate |
2013-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |