| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7e3264bcd63e66e7c4b5d3790d7cb4a8 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E50-10 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0043
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
2013-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7657ca398ec55bf932ec458a014ea6eb |
| publicationDate |
2014-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2014272688-A1 |
| titleOfInvention |
Grayscale lithography of photo definable glass |
| abstract |
A method for forming a three-dimensional microstructure includes providing a photosensitive glass substrate; exposing the photosensitive glass substrate to energy through a continuous tone, variable transmission photomask so as to form opaque portions in the photosensitive glass substrate, each of the opaque portions having one of a variety of depths extending through the entire thickness of the photosensitive glass substrate; and removing the opaque portions so as to form three-dimensional features in the photosensitive glass substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11367939-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017094794-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11594457-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11161773-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210142753-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11139582-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10070533-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11342896-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10903545-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022128529-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11677373-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10665377-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10854946-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11101532-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11270843-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102473256-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11264167-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3948954-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11373908-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11076489-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11662659-B2 |
| priorityDate |
2013-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |