| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6900162c0a64e321929e285aef793d73 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-872
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02104
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02576
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02389
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02579
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-2003 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2014-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_093697912695a8bd200603d75e154c68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa563b80da170e1d393b1f4e2763deff |
| publicationDate |
2014-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2014264366-A1 |
| titleOfInvention |
Semiconductor apparatus and method of manufacturing the same |
| abstract |
A semiconductor apparatus includes a semiconductor substrate that has a diameter of 2 inches or larger, and an N-type semiconductor layer that is stacked on the semiconductor substrate using a material including gallium nitride (GaN). A median of a plurality of measured values of the concentration of carbon (C) at a plurality of locations on a face of a region of the N-type semiconductor layer is equal to or lower than 1.0×10 16 cm −3 . The maximum value in difference between the median and the other measured values is lower than 5×10 15 cm −3 . |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015243736-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10026851-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9184244-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017256657-A1 |
| priorityDate |
2013-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |