| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_07c9542186133097bd6bbb7d92393090 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J2453-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J2325-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41N1-14 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J7-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-02 |
| filingDate |
2013-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59621a8d5dbb858dd56343fed2f0dcbc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8df3a87d1f6783f48cab330af011fdbb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fa33e45aa846af1638c6db53182a82a |
| publicationDate |
2014-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2014263175-A1 |
| titleOfInvention |
Crosslinked random copolymer films for block copolymer domain orientation |
| abstract |
Surface-modifying layers, including neutral layers for vertical domain-forming block copolymers of styrene and methyl methacrylate are provided. Also provided are self-assembled block copolymer structures incorporating the surface modifying layers, methods of fabricating such structures and methods of using the structures in BCP lithography applications. The surface-modifying layers comprise a crosslinked copolymer film, wherein the crosslinked copolymers are random copolymers polymerized from styrene monomers and/or (meth)acrylate monomers and crosslinkable epoxy group-functionalized monomers. The crosslinked copolymer films are characterized by a high content of the crosslinkable epoxy group-functionalized monomer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10532546-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11078337-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10410914-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018112121-A1 |
| priorityDate |
2013-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |