| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a8d191df2a239d8ebabcdd5981838060 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24975 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45555
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45536
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0272
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-545
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-513 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-513 |
| filingDate |
2012-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_788e7c970e472729d3a6188fd3d3f4fb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c909370be2aaf89a24d10540fa041a4 |
| publicationDate |
2014-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2014242365-A1 |
| titleOfInvention |
Method and Device for Manufacturing a Barrier Layer on a Flexible Substrate |
| abstract |
Method and apparatus for manufacturing a barrier layer ( 1 b ) on a substrate. The apparatus comprises an atmospheric pressure glow discharge (APGD) plasma apparatus having at least two electrodes ( 2, 3 ) arranged to generate an atmospheric pressure glow discharge plasma in a treatment space ( 5 ) formed between said two electrodes ( 2, 3 ), and an atomic layer deposition (ALD) device. The apparatus is arranged to provide an inorganic oxide layer ( 1 a ) on the substrate ( 1 ) using the atmospheric pressure glow discharge (APGD) plasma apparatus, and to provide a consecutive deposition ( 1 b ) of between 1 and 70 atomic layers on the inorganic oxide layer ( 1 a ) using the ALD device. The result is a flexible barrier substrate having excellent water vapor transmission ratio, which is able to be manufactured efficiently. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018355482-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020154023-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10276352-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10196740-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3914750-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10914006-B2 |
| priorityDate |
2011-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |