http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014204203-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f9d277d3836381c3114e9d070b5b0af0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0ddfc74d6edf15a9d9a1f770fd81b55e http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e85662883ee11f4790be9874238ffa65 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8806 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B13-22 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-17 |
| filingDate | 2013-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_395c9552ea251e51e90a4a728a719faa http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_272eceade66311b32b41576fcf5fd83b |
| publicationDate | 2014-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2014204203-A1 |
| titleOfInvention | Reflectometer, spectrophotometer, ellipsometer or polarimeter system including sample imaging system that simultaneously meets scheimpflug condition and overcomes keystone error |
| abstract | An imaging system, and method of its use, for viewing a sample surface at an inclined angle, preferably in functional combination with a sample investigating reflectometer, spectrophotometer, ellipsometer or polarimeter system; wherein the imaging system provides that a sample surface and multi-element imaging detector surface are oriented with respect to one another to meet the Scheimpflug condition, and wherein a telecentric lens system is simultaneously positioned between the sample surface and the input surface of the multi-element imaging detector such that an image of the sample surface produced by said multi-element imaging detector is both substantially in focus over the extent thereof, and such that substantially no keystone error is demonstrated in said image. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112204377-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10551326-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105181604-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111033242-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10627288-B1 |
| priorityDate | 2013-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.