Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d2062435332cfd87e1213172f8ba8421 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60c09c6972c397c24a8640f2b56361a7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_093755491d2a447a33452bcc2bb5accd http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_adf225ca4a6bf6190b6a2763410d1ebf |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F2202-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F2203-10 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-554 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-5308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2037 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B1-002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-658 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-53 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
filingDate |
2012-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_928990b77e21f9e321266fdaf35b5c2c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fdd5dac3ba11280bfa9d394c85784f20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e286b0f365473328497d6cfcb6031fa4 |
publicationDate |
2014-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2014193301-A1 |
titleOfInvention |
Method of generating a metamaterial, and a metamaterial generated thereof |
abstract |
A method of generating a metamater-operable in the visible-infrared range is provided. The method comprises a) depositing a layer of a conductive material on a substrate; b) forming a layer of electron beam resist on the layer of conductive material; c) patterning the layer of electron beam resist using electron beam lithography to form a patterned substrate; d) depositing a layer of a noble metal on the patterned substrate; and e) removing the resist. A metamaterial operable in the visible-infrared range comprising split-ring resonators having a least line width of about 20 nm to about 40 nm on a substrate is provided. A transparent photonic device or a sensor for chemical or biological sensing comprising the metamaterial is also provided. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10690809-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018180496-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022026366-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020225389-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9588255-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114530759-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113745845-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110160656-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2023105533-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11662318-B2 |
priorityDate |
2011-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |