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publicationDate 2014-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2014183669-A1
titleOfInvention Resonant sensor with asymmetric gapped cantilevers
abstract A resonant sensor is provided. The resonant sensor may have a structure including a base portion, a mass portion, and a mechanical beam connecting the base portion to the mass portion. In addition, the structure may include a first sensing beam formed from a sensing material responsive to mechanical strain where a gap is formed between the sensing beam and the mechanical beam.
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