| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44abc3a89037e40fb3a11d713d48dd2e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b7886f9841c03e2449d28f454ebbe1dc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3485
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0021 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-083
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0676
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02172
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3485
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32495
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-35 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
2012-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa83028f808b52547af39d3330e30629 |
| publicationDate |
2014-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2014178679-A1 |
| titleOfInvention |
AlON Coated Substrate with Optional Yttria Overlayer |
| abstract |
A fluorine plasma resistant coating on a ceramic substrate is disclosed. In one embodiment the composition includes an AlON coating that is about 2 microns thick that overlies a substrate, and having an optional yttria coating layer that is about 3 microns thick overlies the AlON coating. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10961617-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9637415-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11764037-B2 |
| priorityDate |
2011-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |