| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-4148
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-4145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66477 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-088 |
| filingDate |
2012-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99533ee1f5c9d2228836cfda8e5707af
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7083ea7b72e4d25bbb37fb9bf685782a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2003c68a06ae5c44455219d5005348d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b42e0856580ed9ae0f418b7d8e012c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b52594a87515c972211ffaaf54df3bc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58da2e45128bddcf17dcc83854ba812b |
| publicationDate |
2014-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2014151755-A1 |
| titleOfInvention |
Backside cmos compatible biofet with no plasma induced damage |
| abstract |
The present disclosure provides a bio-field effect transistor (BioFET) device and methods of fabricating a BioFET and a BioFET device. The method includes forming a BioFET using one or more process steps compatible with or typical to a complementary metal-oxide-semiconductor (CMOS) process. The BioFET device includes a gate structure disposed on a first surface of a substrate and an interface layer formed on a second surface of the substrate. The substrate is thinned from the second surface to expose a channel region before forming the interface layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10520467-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10153276-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016329435-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016181240-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9689835-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10545131-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10094801-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10900953-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11486854-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022065812-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9958443-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022381733-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013200438-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9865747-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9466729-B1 |
| priorityDate |
2012-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |