| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60480587582bf8e0ca64c6076c0646ab |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2001-2886
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3348
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31745 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3056
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-286
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-044 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-04 |
| filingDate |
2013-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_82dc856920c6459dc58eb3d945729162 |
| publicationDate |
2014-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2014138350-A1 |
| titleOfInvention |
Method for preparing samples for imaging |
| abstract |
A method and apparatus is provided for preparing samples for observation in a charged particle beam system in a manner that reduces or prevents artifacts. Material is deposited onto the sample using charged particle beam deposition just before or during the final milling, which results in an artifact-free surface. Embodiments are useful for preparing cross sections for SEM observation of samples having layers of materials of different hardnesses. Embodiments are useful for preparation of thin TEM samples. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-116337903-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105158514-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104422605-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3505905-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021118678-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2960924-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11735404-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019120691-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110783220-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015243477-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110006934-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105486553-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109059812-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11075055-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110954568-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021066056-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11315755-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10475629-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9412560-B2 |
| priorityDate |
2011-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |