| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76281
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76232 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762 |
| filingDate |
2012-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1778df5c59dec86c07617b8b268f21e6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a300fdc26e3905df68aebf6c4909311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f2d42fb76d5b4ea186269be81ef47bf9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c03325f223e6067435d64d520d4b9613 |
| publicationDate |
2014-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2014127878-A1 |
| titleOfInvention |
Fabrication of localized soi on localized thick box using selective epitaxy on bulk semiconductor substrates for photonics device integration |
| abstract |
Photonic devices are created by laterally growing a semiconductor material (i.e., a localized semiconductor-on-insulator layer) over a localized buried oxide (BOX) created in a semiconductor by either a trench isolation process or thermal oxidation. In one embodiment, and after trench formation in a semiconductor substrate, the trench is filled with oxide to create a localized BOX. The top surface of the BOX is recessed to depth below the topmost surface of the semiconductor substrate to expose sidewall surfaces of the semiconductor substrate within each trench. A semiconductor material is then epitaxially grown from the exposed sidewall surfaces of the semiconductor substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11456354-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10312323-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9601568-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016172440-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9741792-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10374035-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014170834-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8877600-B2 |
| priorityDate |
2012-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |