| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d343b4322ffbb260e237b296df287351
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c766032e7599c3b93ed42ed5c85925f4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a9154f7af3eff1d8ed322f88f3715dff |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-90
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-033 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01G4-005 |
| filingDate |
2012-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f57fb9c65875383e7303b50a9c5aef92
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94da70d1bb4bfbf3b25071994d20c7af
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dd8c793842719bd07dc87b8e5ba61622 |
| publicationDate |
2014-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2014126105-A1 |
| titleOfInvention |
Capacitor structure and process for fabricating the same |
| abstract |
A process for fabricating a capacitor is described. A template layer including a stack of at least one first layer and at least one second layer is formed over a substrate, wherein the at least one first layer and the at least one second layer have different etching selectivities and are arranged alternately. An opening is formed through the template layer. A wet etching process is performed to recess the at least one first layer relative to the at least one second layer, at the sidewall of the opening. A bottom electrode of the capacitor is formed at the bottom of the opening and on the sidewall of the opening, and then the template layer is removed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11217458-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10079277-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017365488-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110246693-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102015122016-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11778809-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10679863-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9735028-B2 |
| priorityDate |
2012-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |