Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F22-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-1811 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-1808 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F220-1807 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D4-00 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F22-10 |
filingDate |
2013-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_010b29063df5c252c86ff7b15e0dab8c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79a4c297fe26465f427b7bf18a643a56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84d9f1f50907cdfea6c493745594712a |
publicationDate |
2014-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2014121292-A1 |
titleOfInvention |
Curable composition for imprints, patterning method and pattern |
abstract |
Provided is a curable composition for imprints having good patternability and dry etching resistance. Disclosed is a curable composition for imprints comprising at least one kind of polymerizable monomer selected from the following compounds and a photopolymerization initiator; |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014154471-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022132431-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11435663-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11261267-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9376581-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2017150261-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11029597-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11319393-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9868846-B2 |
priorityDate |
2008-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |